The three companies of the Busch Group – Busch Vacuum Solutions, Pfeiffer Vacuum+Fab Solutions and centrotherm clean solutions – announce their joint presence at Semicon Japan 2024.
The booth will showcase the combined competence of the three companies by presenting their wide range of vacuum solutions and technological expertise. This includes vacuum pumps, contamination management systems, leak detectors, valves, gas abatement solutions and comprehensive sub-fab management, all aimed at improving the infrastructure of Japanese semiconductor manufacturing facilities. Visitors can discover the Group“s joint product portfolio.
Unmatched range of vacuum and abatement solutions
Among the highlights of the exhibition are several innovative products:
COBRA, HiScroll and UltiDry vacuum pumps are essential solutions for the semiconductor market, each offering distinct advantages tailored to specific applications.
The COBRA NX 0950 A from Busch Vacuum Solutions is a reliable dry vacuum pump with proven screw vacuum technology for minimal maintenance. It is perfectly suited as the heart of a central vacuum system.
HiScroll pumps from Pfeiffer Vacuum+Fab Solutions are powerful, oil-free and safe. They can help save energy and are low in vibration. These scroll pumps are suitable for light applications.
When robustness combined with low energy demand is required, UltiDry from Pfeiffer Vacuum+Fab Solutions comes into play. This multi-stage dry vacuum pump is well suited for harsh applications. Engineered to enhance powder management and handle high inlet flow, UltiDry withstands corrosive gases and offers lower power consumption under harsh operation.
Showcased in a digital format, the high-temperature thermal abatement system from centrotherm clean solutions combines the wide process coverage of flame abatement with the fuel-free aspects of plasma abatement. It features lower operating costs as well as secondary emissions and is capable of destroying the molecular process gas NF3 at class-leading levels with extremely low NOx emissions. This system provides a sustainable solution with a minimal carbon footprint for the CVD and metal-etch processes.
Trade show visitors can meet experts from Busch Vacuum Solutions, Pfeiffer Vacuum+Fab Solutions, and centrotherm clean solutions at Semicon Japan from December 11 to 13, 2024, at booth 3302 in the east hall 3 at Tokyo Big Sight. The event offers an excellent opportunity for attendees to engage with industry leaders and learn more about the latest advancements in vacuum and abatement technology.
The Busch Group is one of the world“s largest manufacturers of vacuum pumps, vacuum systems, blowers, compressors and gas abatement systems. Under its umbrella, the group houses three well-known brands: Busch Vacuum Solutions, Pfeiffer Vacuum+Fab Solutions and centrotherm clean solutions.
The extensive product and service portfolio includes solutions for vacuum, overpressure and abatement applications in all industries, such as food, semiconductors, analytics, chemicals and plastics. This also includes the design and construction of tailor-made vacuum systems and a worldwide service network.
The Busch Group is a family business that is managed by the Busch family. More than 8,000 employees in 44 countries worldwide work for the group. Busch is headquartered in Maulburg, Baden-Württemberg, in the tri-country region of Germany, France and Switzerland.
The Busch Group manufactures in its 19 own production plants in China, the Czech Republic, France, Germany, India, Romania, South Korea, Switzerland, the United Kingdom, the USA and Vietnam.
The Busch Group has an annual consolidated revenue of close to 2 billion Euro.
Company-Contact
Busch Vacuum Solutions
Florian Held
Schauinslandstrasse 1
79689 Maulburg
Phone: +49 (0)7622 681 3376
E-Mail: 
Url: https://www.buschgroup.com/
Press
Busch Vacuum Solutions
Fabian Fahlbusch
Schauinslandstrasse 1
79689 Maulburg
Phone: +49 (0)7622 681 – 3379
E-Mail: 
Url: https://www.buschvacuum.com
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